EN-62047-16 › Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films GÇô Wafer curvature and cantilever beam deflection methods
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films GÇô Wafer curvature and cantilever beam deflection methods
To find similar documents by classification:
31.080.99 (Other semiconductor devices)
Document Number
EN 62047-16:2015
Revision Level
2015 EDITION
Status
Current
Publication Date
July 10, 2015