EN-62047-11 › Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

EN-62047-11 - 2013 EDITION - CURRENT -- See the following: BS-EN-62047-11 DIN-EN-62047-11



Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems


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Document Number

EN 62047-11:2013

Revision Level

2013 EDITION

Status

Current

Publication Date

Sept. 27, 2013