DIN-EN-62047-11 › Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013); German version EN 62047-11:2013

DIN-EN-62047-11 - 2014 EDITION - CURRENT



Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013); German version EN 62047-11:2013


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Document Number

DIN EN 62047-11:2014-04

Revision Level

2014 EDITION

Status

Current

Publication Date

April 1, 2014