ASTM-F71 › Standard Practice for Using the Morphological Key for the Rapid Identification of Fibers for Contamination Control in Electron Devices and Microelectronics (Withdrawn 2005)
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Scope
1.1 This practice covers the rapid identification of nonmetallic, fibrous contaminants by the microscopical examination of their morphology. The procedure is intended either to provide tentative identification or to serve as a supporting test in confirming the identity of suspected fibrous contaminants.
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
Keywords
Contamination-semiconductors; identification of fibers (for contaminationcontrol in electron; devices/microelectronics), using morphological key, method,; Electron tubes; fiber particulate contamination, identification and controlof, using; morphological key,; Fiber morphology/identification; contamination control in electron devices and microelectronics,; Microscopic examination-electronic materials; fibrous contaminants (in electronic/microelectronic devices), using a; morphology key for rapid identification;;
To find similar documents by ASTM Volume:
15.03 (Space Simulation; Aerospace and Aircraft; Composite Materials)
To find similar documents by classification:
31.020 (Electronic components in general Magnetic components, see 29.100.10)
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This document is available in Paper format.
Document Number
ASTM-F71-68(1995)e1
Revision Level
1968 R95(E1) EDITION
Status
Superseded
Modification Type
Replaced
Publication Date
June 1, 1995
Document Type
Practice
Page Count
6 pages
Committee Number
E21.05