IEC-63229 Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate

IEC-63229 - EDITION 1.0 - CURRENT


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IEC 63229:2021(E) gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate. They are identified and described on the basis of examples, mainly by schematic illustrations, optical microscope images, and transmission electron microscope images for these defects. This document covers only defects in as-grown GaN epitaxial film on SiC substrate and does not include defects caused by subsequent processes.
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Document Number

IEC 63229 Ed. 1.0 en:2021

Revision Level

EDITION 1.0

Status

Current

Publication Date

April 1, 2021

Committee Number

47