IEC-63229 › Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate
IEC-63229
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EDITION 1.0
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CURRENT
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IEC 63229:2021(E) gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate. They are identified and described on the basis of examples, mainly by schematic illustrations, optical microscope images, and transmission electron microscope images for these defects. This document covers only defects in as-grown GaN epitaxial film on SiC substrate and does not include defects caused by subsequent processes.
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31.080.99 (Other semiconductor devices)
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Document Number
IEC 63229 Ed. 1.0 en:2021
Revision Level
EDITION 1.0
Status
Current
Publication Date
April 1, 2021
Committee Number
47