IEC-62047-32 › Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

IEC-62047-32 - EDITION 1.0 - CURRENT


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IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
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Document Number

IEC 62047-32 Ed. 1.0 b:2019

Revision Level

EDITION 1.0

Status

Current

Publication Date

Jan. 1, 2019

Committee Number

47F