EN-62047-5 › Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

EN-62047-5 - 2011 EDITION - CURRENT -- See the following: BS-EN-62047-5 DIN-EN-62047-5



Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches


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31.080.99 (Other semiconductor devices)

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Document Number

EN 62047-5:2011

Revision Level

2011 EDITION

Status

Current

Publication Date

Aug. 19, 2011