BS-EN-62047-6 › Semiconductor devices. Micro-electromechanical devices
BS-EN-62047-6
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2010 EDITION
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CURRENT
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Semiconductor devices. Micro-electromechanical devices
Keywords
Integrated circuits;Tensile testing;Thin films;Test specimens;Fatigue testing;Semiconductor devices;Test equipment;Semiconductor technology;Electromechanical devices;Axial stress;Electronic equipment and components
To find similar documents by classification:
31.080.99 (Other semiconductor devices)
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Document Number
BS EN 62047-6:2010
Revision Level
2010 EDITION
Status
Current
Publication Date
April 30, 2010
Page Count
20
ISBN
9780580585449
International Equivalent
IEC 62047-6:2009;EN 62047-6:2010;EN 62149-6:2003
Committee Number
EPL/47