BS-EN-62047-3 › Semiconductor devices. Micro-electromechanical devices
BS-EN-62047-3
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2006 EDITION
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CURRENT
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Semiconductor devices. Micro-electromechanical devices
Keywords
Specimen preparation;Tensile testing;Control samples;Electromechanical devices;Integrated circuits;Semiconductor technology;Semiconductor devices;Test specimens;Electronic equipment and components;Thin films
To find similar documents by classification:
31.080.99 (Other semiconductor devices)
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Document Number
BS EN 62047-3:2006
Revision Level
2006 EDITION
Status
Current
Publication Date
Nov. 30, 2006
Page Count
12
ISBN
0580497410
International Equivalent
EN 62047-3:2006;IEC 62047-3:2006
Committee Number
EPL/47