BS-EN-62047-15 › Semiconductor devices. Micro-electromechanical devices
BS-EN-62047-15
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2015 EDITION
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CURRENT
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Semiconductor devices. Micro-electromechanical devices
Keywords
Thin films;Electronic equipment and components;Test specimens;Electromechanical devices;Axial stress;Semiconductor technology;Test equipment;Tensile testing;Semiconductor devices
To find similar documents by classification:
31.080.99 (Other semiconductor devices)
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Document Number
BS EN 62047-15:2015
Revision Level
2015 EDITION
Status
Current
Publication Date
July 31, 2015
Page Count
18
ISBN
9780580708022
International Equivalent
EN 62047-15:2015;IEC 62047-15:2015
Committee Number
EPL/47