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Scope

1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.

Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.

Keywords

optical particle counting; particulate contamination; size distribution analysis; surfaces; ICS Number Code 17.040.20 (Properties of surfaces)

To find similar documents by ASTM Volume:

15.03 (Space Simulation; Aerospace and Aircraft; Composite Materials)

To find similar documents by classification:

17.040.20 (Properties of surfaces)

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