SEMI-D31 › Historical Revision Information
Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection
Definition of Measurement Index (Semu) for Luminance Mura in FPD Image Quality Inspection
Document Number
SEMI D31-0213
Revision Level
2013 EDITION
Status
Superseded
Publication Date
Feb. 1, 2013