ISO-25178-607 › Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

ISO-25178-607 - 1ST EDITION - CURRENT


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This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

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Document Number

ISO 25178-607:2019

Revision Level

1ST EDITION

Status

Current

Publication Date

March 1, 2019

Committee Number

ISO/TC 213