ISO-25178-604 › Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

ISO-25178-604 - 1ST EDITION - CURRENT


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ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

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Document Number

ISO 25178-604:2013

Revision Level

1ST EDITION

Status

Current

Publication Date

Aug. 1, 2013

Committee Number

ISO/TC 213