ISO-14644-1 › Historical Revision Information
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration

ISO-14644-1 - FOR 2ND EDITION FINAL DRAFT SEE - SUPERSEDED
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This part of ISO 14644 covers the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Onlyparticlepopulationshavingcumulativedistributionsbased on threshold (lower limit) sizes ranging from 0,1 μm to 5 μm are considered for classification purposes.

This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) and macroparticles (particles larger than 5 μm) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively.

This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles.

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13.040.35 (Cleanrooms and associated controlled environments)

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Document Number

ISO-14644-1

Revision Level

FOR 2ND EDITION FINAL DRAFT SEE

Status

Superseded

Publication Date

Aug. 27, 2015

Committee Number

ISO TC 209/WG 1