DIN-EN-62047-21 › Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014

DIN-EN-62047-21 - 2015 EDITION - CURRENT



Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014


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Document Number

DIN EN 62047-21:2015-04

Revision Level

2015 EDITION

Status

Current

Publication Date

April 1, 2015