DIN-EN-62047-12 › Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

DIN-EN-62047-12 - 2012 EDITION - CURRENT



Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures


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Document Number

DIN-EN-62047-12

Revision Level

2012 EDITION

Status

Current

Publication Date

June 1, 2012