BS-EN-62047-22 › Semiconductor devices. Micro-electromechanical devices
BS-EN-62047-22
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2014 EDITION
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CURRENT
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Semiconductor devices. Micro-electromechanical devices
Keywords
Thin-film devices;Semiconductor technology;Semiconductor devices;Electromechanical devices;Electronic equipment and components;Test equipment;Fatigue testing;Resonance;Integrated circuits;Test specimens;Bend testing;Vibration
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Document Number
BS EN 62047-22:2014
Revision Level
2014 EDITION
Status
Current
Publication Date
Oct. 31, 2014
Page Count
14
ISBN
9780580775550
International Equivalent
IEC 62047-22:2014;EN 62047-22:2014
Committee Number
EPL/47