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Scope

1.1 This test method covers a procedure for calibrating a mass spectrometer-type helium leak detector with a series of commercially available calibrated leaks without need for recourse to a primary standard.

1.2 Leak detector parameters determined by this test method include:

1.2.1 Minimum detectable signal, drift noise (8.5, with recorder; 8.6, without recorder),

1.2.2 Response time,

1.2.3 Minimum detectable leak rate, and

1.2.4 Sensitivity.

1.3 This standard does not purport to address the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

leak detection; minimu leak rate; vacuum devices; ICS Number Code 31.080.01 (Semi-conductor devices in general)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

31.080.01 (Semiconductor devices in general)

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