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Scope

1.1 This test method establishes a procedure for testing components used in ultra-high-purity gas distribution systems for ionic and organic surface residues.

1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form.

1.3 Limitations:

1.3.1 This test method is limited by the sensitivity of the detection instruments and by the available levels of purity in extracting solvents. While the ion and gas chromatographic methods are quantitative, the Fourier transform infrared spectroscopy (FTIR) method can be used as either a qualitative or a quantitative tool. In addition, the gas chromatography (GC) and FTIR methods are used to detect hydrocarbons and halogenated substances that remain as residues on component internal surfaces. This eliminates those materials with high vapor pressures, which are analyzed per the total hydrocarbons test, from this test method.

1.3.2 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to twelve months of experience.

1.4 The values stated in SI units are to be regarded as the standards. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

Keywords

Chromatography-gas; Chromatography-ion; Extractable matter content; Fourier-transform infrared (FTIR) analysis; Gas distribution systems; Ionic/organic extractables; Semiconductor clean rooms; Stainless steel-gas distribution systems; Surface analysis-metals/alloys; ionic/organic extractables of internal electropolished stainless steel; surfaces for gas distribution system components, using IC/GC/FTIR; analysis, test; ICS Number Code 17.040.20 (Properties of surfaces)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

17.040.20 (Properties of surfaces)

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