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Scope

1.1 This test method covers the testing of interior surfaces of components such as tubing, fittings, and valves for surface morphology.

1.2 This test method applies to all surfaces of tubing, connectors, regulators, valves, and any metal component, regardless of size.

1.3 Limitations:

1.3.1 This methodology assumes a SEM operator skill level typically achieved over a 12-month period.

1.3.2 This test method shall be limited to the assessment of pits, stringer, tears, grooves, scratches, inclusions, stepped grain boundaries, and other surface anomalies. However, stains and particles that may be produced during specimen preparation should be excluded in the assessment of anomalies.

1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6.

Keywords

Electron microscopy; Gas distribution systems; Metals and metallic materials; Scanning electron microscope (SEM); Semiconductor clean rooms; Surface analysis-metals/alloys; scanning electron microscope (SEM) analysis of metallic surface; condition for gas distribution system components (for surface; morphology), test; ICS Number Code 17.040.20 (Properties of surfaces)

To find similar documents by ASTM Volume:

10.04 (Electronics; Declarable Substances in Materials; 3D Imaging Systems)

To find similar documents by classification:

17.040.20 (Properties of surfaces)

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